Journal
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES
Volume 367, Issue 1905, Pages 4159-4167Publisher
ROYAL SOC
DOI: 10.1098/rsta.2008.0263
Keywords
polymer memory; organic memory; cross-linkable polymer; stackable memory
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Multi-layer stackable polymer memory architecture is an interesting new direction for polymer memory. The memory density can be increased by increasing the number of stacked layers without reducing the minimum feature size. To achieve multi-level stacking, the polymer used must be able to be cross-linked so that it will not be dissolved upon deposition of additional layers. This requirement also makes the polymer robust enough to withstand conventional lithographic processes. In this paper, the various approaches to achieve cross-linkable polymer memory are discussed. Device fabrication and performance are also reported.
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