Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 90-94Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.04.035
Keywords
High-k inorganic dielectric; Solution processed dielectric and channel; High mobility
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Funding
- Industrial Technology Innovation Program - Ministry of Trade, Industry & Energy (MI, Korea) [10039174]
- Inha University
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This paper reports a solution processed electrical device with zirconium oxide gate dielectric that was fabricated at a low enough temperature appropriate for flexible electronics. Both inorganic dielectric and channel materials were synthesized in the same organic solvent. The dielectric constant achieved was 13 at 250 degrees C with a reasonably low leakage current. The bottom gate transistor devices showed the highest mobility of 75 cm(2)/V s. The device is operated at low voltage with high-k dielectric with excellent transconductance and low threshold voltage. Overall, the results highlight the potential of low temperature solution based deposition in fabricating more complicated circuits for a range of applications. (C) 2015 Elsevier B. V. All rights reserved.
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