Journal
OPTIK
Volume 125, Issue 10, Pages 2413-2416Publisher
ELSEVIER GMBH, URBAN & FISCHER VERLAG
DOI: 10.1016/j.ijleo.2013.10.082
Keywords
Convex/concave microlens array; Mask less grayscale lithography; Replica molding; PDMS
Categories
Funding
- Chinese National Natural Science Foundation [61072131, 61261026]
- Aeronautical Science Foundation of China [CASC201105]
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This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices. (c) 2013 Elsevier GmbH. All rights reserved.
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