Journal
THIN SOLID FILMS
Volume 576, Issue -, Pages 55-60Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2014.11.019
Keywords
Lithium; Solid electrolyte; Garnet; Lithium lanthanate zirconate; Pulsed laser deposition
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Funding
- Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Vehicle Technologies
- Chemical Sciences, Geosciences, and Biosciences Division, Office of Basic Energy Sciences of the U.S. Department of Energy [DE-AC02-05CH11231]
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-76SF00515]
- United States Government
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We present a study of the fabrication of thin films from a Li7La3Zr2O12 ( LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600 degrees C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600 degrees C exhibited the highest room temperature conductivity, 1.61 x 10-6 S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at +4 following physical contact with heated lithium metal. (C) 2014 Elsevier B.V. All rights reserved.
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