4.6 Article

Fabricating nanostructures on fused silica using femtosecond infrared pulses combined with sub-nanojoule ultraviolet pulses

Journal

OPTICS LETTERS
Volume 39, Issue 19, Pages 5638-5640

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OL.39.005638

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Funding

  1. Army Research Office
  2. National Science Foundation [CMMI 1131627]
  3. Directorate For Engineering
  4. Div Of Civil, Mechanical, & Manufact Inn [1131627] Funding Source: National Science Foundation

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Circular craters with diameters of 500 nm are fabricated on the surface of fused silica by femtosecond ultraviolet-infrared (UV-IR) pulse trains with 0.8 nJ UV pulse energy. UV damage thresholds at different IR energies and UV-IR delays are measured. Diameters and depths of the ablated craters can be modified by adding the IR pulse and varying the UV-IR delays. These results demonstrate the feasibility of nanomachining using short wavelength lasers with pulse energy far below normal damage thresholds. (C) 2014 Optical Society of America

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