Journal
OPTICS LETTERS
Volume 39, Issue 13, Pages 3702-3705Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.39.003702
Keywords
-
Categories
Funding
- New Energy and Industrial Technology Development Organization (NEDO)
Ask authors/readers for more resources
We report good phase controllability and high production yield in Si-nanowire-based multistage delayed Mach-Zehnder interferometer-type optical multiplexers/demultiplexers (MUX/DeMUX) fabricated by an ArF-immersion lithography process on a 300 mm silicon-on-insulator (SOI) wafer. Three kinds of devices fabricated in this work exhibit clear 1 x 4 Ch wavelength filtering operations for various optical frequency spacing. These results are promising for their applications in high-density wavelength division multiplexing-based optical interconnects. (C) 2014 Optical Society of America
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available