4.6 Article

Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Journal

OPTICS LETTERS
Volume 38, Issue 2, Pages 187-189

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OL.38.000187

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Funding

  1. National Basic Research Program of China [2011CB808100]
  2. National Natural Science Foundation of China [60921004, 61108015, 60825406]

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We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of similar to 40 nm and an axial size of similar to 1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates. (C) 2013 Optical Society of America

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