Journal
OPTICS LETTERS
Volume 38, Issue 8, Pages 1304-1306Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.38.001304
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Funding
- Air Force Office of Scientific Research [FA9550-12-1-0419]
- National Science Foundation [ECS-0335765]
- Case School of Engineering
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We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19 x 10(3), fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92 x 10(-5)/K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications. (C) 2013 Optical Society of America
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