Journal
OPTICS LETTERS
Volume 37, Issue 6, Pages 1020-1022Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.37.001020
Keywords
-
Categories
Funding
- Air Force Office of Scientific Research (AFOSR) Multidisciplinary University Research Initiative (MURI) [FA 9550-08-1-0394]
- Small Business Innovative Research [FA 9550-11-C-0014]
Ask authors/readers for more resources
In this Letter, we demonstrate for the first time (to our best knowledge) stamp printing of silicon nanomembrane (SiNM)-based in-plane photonic devices onto a flexible substrate using a modified transfer printing method that utilizes a suspended configuration, which can adjust the adhesion between the released SiNM and the handle silicon wafer. With this method, 230 nm thick, 30 mu m wide, and up to 5.7 cm long SiNM-based waveguides are transferred to flexible Kapton films with >90% transfer yield. The propagation loss of the transferred waveguides is measured to be similar to 1.1 dB/cm. Scalability of this approach to transfer intricate structures, such as photonic crystal waveguides and multimode interference couplers with a minimum feature size of 200 nm and 2 mu m, respectively, is also demonstrated. (C) 2012 Optical Society of America
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available