Journal
OPTICS LETTERS
Volume 35, Issue 10, Pages 1701-1703Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.35.001701
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Funding
- National Science Foundation (NSF) [CMMI0644914]
- Center for Rotorcraft Innovations [W911W6-06-2-0002]
- United States Army Research Office (USARO) [W911NF0710215]
- Maryland NanoCenter and its NispLab
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We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that utilizes the total internal reflection at a 45 degrees angled fiber end face to steer the optical axis by 90 degrees. By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer-metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9-14.2 psi, with a sensitivity of 0.009 mu m/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids. (C) 2010 Optical Society of America
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