Journal
OPTICS LETTERS
Volume 34, Issue 3, Pages 271-273Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.34.000271
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- National Science Foundation (NSF) [EEC-0310717]
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We report the demonstration of a reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55 +/- 3 nm. The microscope uses illumination from a tabletop extreme ultraviolet laser to acquire aerial images of photolithography masks with a 20 s exposure time. The modulation transfer function of the optical system was characterized. (C) 2009 Optical Society of America
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