Journal
OPTICS LETTERS
Volume 34, Issue 24, Pages 3809-3811Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.34.003809
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Funding
- National Nature Science Fund of China [50875185]
- Nanometer Dimension Measurement and Criterion Establishment Technology Research [2007GYJ017]
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A common-path laser interferometer is introduced. Its most important feature is that two optical arms are entirely in a common path. Laser Doppler and laser polarization interference technologies are used in the proposed optical system. An experiment setup is established. The primary experimental result shows that this common path method is very feasible. The resolution is 0.72 nm within a 0.01 mm range, and the highest velocity is 0.56 mm/s. There is much room to improve its performance. (C) 2009 Optical Society of America
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