Journal
OPTICS LETTERS
Volume 33, Issue 15, Pages 1653-1655Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.33.001653
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Funding
- USAF-BAA Award [FA8650-06-C1025]
- Ohio Third Frontier Project [TECH-05030]
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We report the optical characterization of a metal wiregrid micropolarizer array for IR imaging polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 mu m band with a specially designed thin SiO2 layer between the silicon substrate and the wiregrids to improve the performance at the shorter wavelengths. Deep-UV projection lithography is used to fabricate 1.40-nm-deep wiregrids with a 400 nm period. The extinction ratio and the transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient greater than 70% with an extinction ratio greater than 104 is achieved for the midwave-IR region while maintaining an extinction ratio better than 102 for the near-IR region above 1.5 mu m. (c) 2008 Optical Society of America.
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