Journal
OPTICS EXPRESS
Volume 22, Issue 15, Pages 18748-18756Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.22.018748
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Funding
- Japan Society for the Promotion of Science (JSPS)
- KAKENHI [25889001]
- Ministry of Education, Culture, Sports, Science and Technology (MEXT) of Japan [22109005]
- Grants-in-Aid for Scientific Research [22109005, 25889001, 14J04080] Funding Source: KAKEN
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We explore possibilities of waveguide-mode interference lithography (WMIL) technique for high contrast subwavelength structures in the visible region. Selecting an appropriate waveguide-mode, we demonstrate high contrast resist mask patterns for the first time. TM1 mode in the waveguide is shown to be useful for providing a three-dimensional structure whose cross section is checkerboard pattern. Applying our WMIL technique, we demonstrate 1D, 2D and 3D subwavelength resist patterns that are widely used for the fabrication of metamteterials in the visible region. In addition to the resist patterns, we demonstrate a resonance at 1.9 eV for a split tube structure experimentally. (C)2014 Optical Society of America
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