4.6 Article

Chalcogenide phase-change thin films used as grayscale photolithography materials

Related references

Note: Only part of the references are listed.
Article Engineering, Electrical & Electronic

Fabricating a multi-level barrier-integrated microfluidic device using grey-scale photolithography

Yoonkwang Nam et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)

Proceedings Paper Geosciences, Multidisciplinary

Dot distribution type of grayscale mask and colorscale photomask for fabrication diffractive and refractive microlens arrays

Qingle Tang

MIPPR 2013: REMOTE SENSING IMAGE PROCESSING, GEOGRAPHIC INFORMATION SYSTEMS, AND OTHER APPLICATIONS (2013)

Article Materials Science, Multidisciplinary

Selective wet etching of Ge2Sb2Te5 phase-change thin films in thermal lithography with tetramethylammonium

Changmeng Deng et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2011)

Article Optics

Laser direct writing pattern structures on AgInSbTe phase change thin film

Aihuan Dun et al.

CHINESE OPTICS LETTERS (2011)

Article Chemistry, Multidisciplinary

Nano-optical information storage induced by the nonlinear saturable absorption effect

Jingsong Wei et al.

NANOSCALE (2011)

Article Physics, Applied

Origin of the giant optical nonlinearity of Sb2Te3 phase change materials

Jing Liu et al.

APPLIED PHYSICS LETTERS (2010)

Article Materials Science, Multidisciplinary

Prediction of topological insulating behavior in crystalline Ge-Sb-Te

Jeongwoo Kim et al.

PHYSICAL REVIEW B (2010)

Article Physics, Multidisciplinary

Topological insulators in Bi2Se3, Bi2Te3 and Sb2Te3 with a single Dirac cone on the surface

Haijun Zhang et al.

NATURE PHYSICS (2009)

Article Engineering, Electrical & Electronic

Modeling of programming and read performance in phase-change memories - Part II: Program disturb and mixed-scaling approach

Ugo Russo et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2008)

Article Physics, Multidisciplinary

Origin of the optical contrast in phase-change materials

Wojciech Welnic et al.

PHYSICAL REVIEW LETTERS (2007)

Article Physics, Applied

Ultrafast-laser-induced parallel phase-change nanolithography

Y. Lin et al.

APPLIED PHYSICS LETTERS (2006)

Article Physics, Applied

Models for phase-change of Ge2Sb2Te5 in optical and electrical memory devices

S Senkader et al.

JOURNAL OF APPLIED PHYSICS (2004)

Article Physics, Applied

Nanosize fabrication using etching of phase-change recording films

T Shintani et al.

APPLIED PHYSICS LETTERS (2004)

Article Chemistry, Physical

Understanding the phase-change mechanism of rewritable optical media

AV Kolobov et al.

NATURE MATERIALS (2004)

Article Engineering, Electrical & Electronic

Investigation of gray-scale technology for large area 3D silicon MEMS structures

CM Waits et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2003)

Article Multidisciplinary Sciences

Thin-film thermoelectric devices with high room-temperature figures of merit

R Venkatasubramanian et al.

NATURE (2001)