Journal
OPTICS EXPRESS
Volume 22, Issue 17, Pages 20008-20013Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.22.020008
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Funding
- German Federal Ministry of Research and Education (BMBF) within the CoolSilicon cluster [75702/2583]
- European Union
- Free State of Saxony via ESF project [100087859]
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We demonstrate full-field X-ray microscopy using crossed multilayer Laue lenses (MLL). Two partial MLLs are prepared out of a 48 m high multilayer stack consisting of 2451 alternating zones of WSi2 and Si. They are assembled perpendicularly in series to obtain two-dimensional imaging. Experiments are done in a laboratory X-ray microscope using Cu-K alpha radiation (E = 8.05 keV, focal length f = 8.0 mm). Sub-100 nm resolution is demonstrated without mixed-order imaging at an appropriate position of the image plane. Although existing deviations from design parameters still cause aberrations, MLLs are a promising approach to realize hard X-ray microscopy at high efficiencies with resolutions down to the sub-10 nm range in future. (C) 2014 Optical Society of America
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