Journal
OPTICS EXPRESS
Volume 22, Issue 26, Pages 32245-32260Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.22.032245
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Funding
- National Science Foundation Sensor and Sensing Systems division [1030270]
- Army Research Office Young Investigator Award [W911NF-12-1-0253]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [1030270] Funding Source: National Science Foundation
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A miniature MEMS switch is designed, fabricated, and incorporated in a reconfigurable metallic mesh filter for broadband terahertz modulation. The mechanical, electrical, and geometrical properties of the MEMS switch are set to enable broadband terahertz modulation with relatively low modulation voltage, high modulation speed, and high device reliability. The implemented miniature MEMS switch exhibits an actuation voltage of 30 V, a fundamental mechanical resonance frequency of 272 kHz, and an actuation time of 1.23 mu s, enabling terahertz modulation with a record high modulation depth of more than 70% over a terahertz band of 0.1-1.5 THz, with a modulation voltage of 30 V and modulation speeds exceeding 20 kHz. (c) 2014 Optical Society of America
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