Journal
OPTICS EXPRESS
Volume 21, Issue 3, Pages 2823-2831Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.21.002823
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Funding
- Proposal Program of SACLA Experimental Instruments of RIKEN
- Global COE Program from the Ministry of Education, Sports, Culture, Science and Technology, Japan
- RIKEN
- Grants-in-Aid for Scientific Research [23226004] Funding Source: KAKEN
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We report a Bragg beam splitter developed for utilization of hard x-ray free-electron lasers. The splitter is based on an ultrathin silicon crystal operating in the symmetric Bragg geometry to provide high reflectivity and transmissivity simultaneously. We fabricated frame-shaped Si(511) and (110) crystals with thicknesses below 10 mu m by a reactive dry etching method using atmospheric-pressure plasma. The thickness variation over an illuminated area is less than 300 nm peak-to-valley. High crystalline perfection was verified by topographic and diffractometric measurements. The crystal thickness was evaluated from the period of the Pendellosung beats measured with a highly monochromatic and collimated x-ray probe. The crystals provide two replica pulses with uniform wavefront [(<1/50)lambda] and low spatial intensity variation (<5%). These Bragg beam splitters will play an important role in innovating XFEL applications. (C) 2013 Optical Society of America
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