Journal
OPTICS EXPRESS
Volume 21, Issue 18, Pages 20964-20973Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.21.020964
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Funding
- Laboratoire d'Excellence NanoSaclay
- Triangle de la Physique
- Vietnam International Education Development 322 program
- China Scholarship Council
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We demonstrate a new 3D fabrication method to achieve the same results as those obtained by the two-photon excitation technique, by using a simple one-photon elaboration method in a very low absorption regime. Desirable 2D and 3D submicrometric structures, such as spiral, chiral, and woodpile architectures, with feature size as small as 190 nm have been fabricated, by using just a few milliwatts of a continuous-wave laser at 532 nm and a commercial SU8 photoresist. Different aspects of the direct laser writing based on ultralow one-photon absorption (LOPA) technique are investigated and compared with the TPA technique, showing several advantages, such as simplicity and low cost. (C) 2013 Optical Society of America
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