Journal
OPTICS EXPRESS
Volume 21, Issue 26, Pages 31830-31836Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.21.031830
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Funding
- Spanish Ministerio de Ciencia e Innovacion through Consolider Programme (SAUUL) [CSD2007-00013, FIS2010-15746]
- Generalitat Valenciana
- Universitat Jaume I [PROMETEO/2012/021, P11B2010-26]
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We experimentally demonstrate multi-beam high spatial resolution laser micromachining with femtosecond pulses. The effects of chromatic aberrations as well as pulse stretching on the material processed due to diffraction were significantly mitigated by using a suited dispersion compensated module (DCM). This permits to increase the area of processing in a factor 3 in comparison with a conventional setup. Specifically, 52 blind holes have been drilled simultaneously onto a stainless steel sample with a 30 fs laser pulse in a parallel processing configuration. (C) 2013 Optical Society of America
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