Journal
OPTICS EXPRESS
Volume 21, Issue 5, Pages 5247-5254Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.21.005247
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Funding
- Academy of Finland Photonics and modern imaging techniques program [134915, 134895]
- Academy of Finland (AKA) [134895, 134915] Funding Source: Academy of Finland (AKA)
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Stroboscopic scanning white light interferometry (SSWLI) allows precise three dimensional (3D) measurements of oscillating samples. Commercial SSWLI devices feature limited pulsing frequency. To address this issue we built a 400-620 nm wideband 150 mW light source whose 1.6 mu m wide interferogram is without side peaks. The source combines a non-phosphor white LED with a cyan LED. We measured a calibration artifact with 10 nm precision and obtained 40 nm precision when measuring the 3D profile of a capacitive micromachined ultrasonic transducer membrane operating at 2.72 MHz. This source is compatible with solid state technology. (C) 2013 Optical Society of America
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