4.6 Article

High speed silicon Mach-Zehnder modulator based on interleaved PN junctions

Journal

OPTICS EXPRESS
Volume 20, Issue 14, Pages 15093-15099

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.20.015093

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Funding

  1. National Basic Research Program of China [2011CB301701, 2012CB933502, 2012CB933504]
  2. Knowledge Innovation Program of the Chinese Academy of Sciences [KGCX2-EW-102]
  3. National Natural Science Foundation of China [61107048, 60877036]

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A high speed silicon Mach-Zehnder modulator is proposed based on interleaved PN junctions. This doping profile enabled both high modulation efficiency of V pi L pi = 1.5 similar to 2.0 V.cm and low doping-induced loss of similar to 10 dB/cm by applying a relatively low doping concentration of 2 x 10(17) cm(-3). High speed operation up to 40 Gbit/s with 7.01 dB extinction ratio was experimentally demonstrated with a short phase shifter of only 750 mu m. (c) 2012 Optical Society of America

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