Journal
OPTICS EXPRESS
Volume 20, Issue 23, Pages 25267-25274Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.20.025267
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Funding
- European Space Agency [21212/07/NL/IA]
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We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700 mu m long and 50 mu m wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25 mu m while showing negligible crosstalk and bowing as small as 0.14 mu m over 700 mu m. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5 mu m or spectra generators up to 2.5 mu m. (C) 2012 Optical Society of America
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