Journal
OPTICS EXPRESS
Volume 20, Issue 17, Pages 19030-19038Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.20.019030
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- National Science Council (NSC) in Taiwan [NSC 99-2627-B-006-017, NSC 99-2320-B-006-012-MY3]
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One of the limits of conventional scanning multiphoton microfabrication is its low throughput due to point-by-point processing. In order to surpass this limit, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to quickly provide three-dimensional (3D) freeform polymer microstructures. 3D freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking two-dimensional fabricating patterns. The size of each fabrication area can be larger than 300 x 170 mu m(2) (full width at half maximum). Compared to conventional scanning multiphoton excitation and fixed mask pattern generation, this approach offers freeform microstructures and a greater than three-order increase in fabrication speed. Furthermore, the system is capable of optically sectioning the fabricated microstructures for providing 3D inspection. (C) 2012 Optical Society of America
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