Journal
OPTICS EXPRESS
Volume 20, Issue 11, Pages 11855-11862Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.20.011855
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Funding
- Flemish government
- European Council (ERC)
- Fonds voor Wetenschappelijke Onderzoek Vlaanderen (FWO)
- FWO-Vlaanderen [G077012]
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Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH3 with selectivity relative to CO2. The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH3 within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications. (c) 2012 Optical Society of America
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