4.6 Article

High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform

Journal

OPTICS EXPRESS
Volume 18, Issue 17, Pages 18278-18283

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.18.018278

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Funding

  1. Institute for the Promotion of Innovation by Science and Technology in Flanders (IWT)
  2. Fund for Scientific Research Vlaanderen (FWO)
  3. European Community [FP7/2007-2013, 224312 HELIOS]
  4. Ghent University

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A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of -1.6dB and a 3dB bandwidth of 80nm. (C) 2010 Optical Society of America

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