Journal
OPTICS EXPRESS
Volume 19, Issue 1, Pages 175-184Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.19.000175
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Funding
- European Community [226716]
- Collaborative Project NFFA-Nanoscale Foundries and Fine Analysis [212348]
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X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV. (C) 2010 Optical Society of America
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