Journal
OPTICS EXPRESS
Volume 18, Issue 7, Pages 7031-7037Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.18.007031
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- JST (FICFAT)
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Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phase-shift was measured in a Mach-Zehnder interferometer to be 3.0 pi at the displacement of 1.0 mu m at the voltage of 31V. The dimension of the fabricated device is 50 mu m wide and 85 mu m long. (C) 2010 Optical Society of America
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