Journal
OPTICS EXPRESS
Volume 18, Issue 17, Pages 18312-18323Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.18.018312
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Funding
- Air Force Office of Scientific Research [FA9550-09-1-0572]
- Defense Advanced Research Projects Agency [HR0011-09-1-0014]
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The strong thermooptic effect in silicon enables low-power and low-loss reconfiguration of large-scale silicon photonics. Thermal reconfiguration through the integration of metallic microheaters has been one of the more widely used reconfiguration techniques in silicon photonics. In this paper, structural and material optimizations are carried out through heat transport modeling to improve the reconfiguration speed of such devices, and the results are experimentally verified. Around 4 mu s reconfiguration time are shown for the optimized structures. Moreover, sub-microsecond reconfiguration time is experimentally demonstrated through the pulsed excitation of the microheaters. The limitation of this pulsed excitation scheme is also discussed through an accurate system-level model developed for the microheater response. (C) 2010 Optical Society of America
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