Journal
OPTICS EXPRESS
Volume 18, Issue 19, Pages 20086-20095Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.18.020086
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- Air Force Office of Scientific Research [FA9550-09-C-0212]
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This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This technique is promising to realize high density integration of multilayer hybrid structures on flexible substrates. (C) 2010 Optical Society of America
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