Journal
OPTICS EXPRESS
Volume 18, Issue 22, Pages 23488-23494Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.18.023488
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The effect of the spot diameter in nanosecond excimer laser percussion drilling of through via in silicon wafer is presented. Experimental results show a ten fold increase of the ablation efficiency when decreasing the spot diameter from 220 mu m to 9 mu m at constant fluence in the range 7.5 J/cm(2) to 13.2 J/cm(2). Such effect is absent when using 60 ps deep-UV laser pulses. A model is developed that explain the findings in terms of plume shielding effect on the laser pulse. The model is successfully applied also on previously published data on deep-UV laser drilling of Polyimide and Alumina. (C) 2010 Optical Society of America
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