Journal
OPTICS EXPRESS
Volume 17, Issue 6, Pages 4752-4757Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.17.004752
Keywords
-
Categories
Funding
- Defense Advanced Research Projects Agency (DARPA)
- National Science Foundation [ECS-0335765]
Ask authors/readers for more resources
We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 mu m. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 mu m bending radius.(C) 2009 Optical Society of America
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available