Journal
OPTICS EXPRESS
Volume 17, Issue 25, Pages 22918-22924Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.17.022918
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Funding
- Korea Science and Engineering Foundation (KOSEF) [R01-2007-000-21036-0]
- WCU (World Class University) [R31-2008-000-10071-0]
- Ministry of Education, Science and Technology (MEST)
- MKE [09ZC1410]
- National Research Council of Science & Technology (NST), Republic of Korea [09ZC1410] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [R01-2007-000-21036-0] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by process-related roughness. (C) 2009 Optical Society of America
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