Journal
OPTICS EXPRESS
Volume 18, Issue 1, Pages 378-385Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.18.000378
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- National Science Foundation
- NNIN program
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In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50 mu m thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees. The polymeric waveguide array with 45 degrees micromirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency. (C) 2009 Optical Society of America
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