Journal
OPTICS EXPRESS
Volume 17, Issue 17, Pages 14543-14551Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.17.014543
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Funding
- air force office of scientific research (AFOSR) [FA9550-06-01-2003]
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High quality factor (Q approximate to 3.4 x 10(6)) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling. (C) 2009 Optical Society of America
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