Journal
OPTICS EXPRESS
Volume 17, Issue 4, Pages 2500-2507Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.17.002500
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- Agilent Technology Foundation
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With two-photon absorption induced polymerization arbitrary three dimensional nano- and microstructures can be patterned directly into photoresists. We report on the fabrication of a low threshold organic semiconductor distributed feedback laser using the technique of two-photon absorption induced polymerization. A surface grating with 400 nm periodicity and 40 nm height modulation was fabricated by two-photon absorption induced polymerization in the organic-inorganic hybrid material ORMOCER (R). With structuring several stacked layers acting as a planar basis for the nanostructure microscopic substrate tilt can be compensated simply. This enabled us to uniformly nano- structure the surface grating over an area of 200 x 200 mu m(2). (C) 2008 Optical Society of America
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