Journal
OPTICS EXPRESS
Volume 17, Issue 25, Pages 22543-22552Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.17.022543
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- The Danish Research Council for Technology and Production Sciences [274-07-0057, 274-07-0379]
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A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed. (C) 2009 Optical Society of America
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