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OPTICS EXPRESS
Volume 16, Issue 3, Pages 1497-1506Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.16.001497
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A positioning system based on a new zooming interferometer was developed for calibrating ultrahigh-resolution linear encoders. In the system, the positioning resolution is scaled down from that of the driving stage to that of the controlled stage by a zooming ratio that is determined by the ratio bettween the wavelengths of the optical sources for the zooming interferometer, so that the resolution in the controlled stage becomes very high. A femtosecond optical comb is used to stabilize two external-cavity diode lasers that are used as optical sources for the interferometer. The system realized a resolution of better than 30 pm and a stability of 1 nm. (c) 2008 Optical Society of America.
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