Journal
OPTICS COMMUNICATIONS
Volume 289, Issue -, Pages 69-74Publisher
ELSEVIER
DOI: 10.1016/j.optcom.2012.09.076
Keywords
Integrated optics; Optical devices; Optical elements
Categories
Funding
- MKE/KEIT [10037359]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10037359] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate. (C) 2012 Elsevier B.V. All rights reserved.
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