Journal
OPTICS COMMUNICATIONS
Volume 307, Issue -, Pages 46-49Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.optcom.2013.05.055
Keywords
Polarization beam splitter (PBS); Multimode interference (MMI); Silicon-on-insulator (SOI); Quasi-state imaging
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Funding
- National High Technology Research and Development Program of China (863 program) [2011AA010302]
- National Natural Science Foundation of China (NSFC) [61071084]
- National Basic Research Program of China (973 program) [2012CB315606]
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A high extinction ratio polarization beam splitter based on multimode interference coupler has been obtained on silicon-on-insulator. The multimode interference coupler is designed by using quasi-state imaging theory, and fabricated with E-beam lithography and induced coupled plasma etching technology. The device has footprint of 8.16 mu m x 1034 mu m. The measured extinction ratios remain 45 dB for TE mode and 23 dB for TM mode at wavelength of 1.55 mu m. The extinction ratio of more than 20 dB for TE mode and 15 dB for TM mode is observed covering the whole C-band. (C) 2013 Elsevier By. All rights reserved.
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