Two-wavelength micro-interferometry for 3-D surface profiling

Three-dimensional non-contact optical techniques for rapid and accurate mapping of micro-machined surfaces are important for the optoelectronic industry. Interferometry is a well-established technique for 3-D surface profiling. The conventional interferometric surface profilers using a single wavelength offer excellent vertical resolution, but a serious limitation to their use is that they can only handle smooth profiles and step heights less than half a wavelength. In this paper we describe a two-wavelength micro-interferometric setup for 3-D Surface profile characterization of smooth as well as rough micro-specimens. The method removes ambiguity associated with the single-wavelength data and also extends the phase measurement range compared to the conventional single-wavelength interferometry. Seven-phase step algorithm is used for quantitative fringe analysis. The design of the system along with experimental results on smooth and rough micro-specimens is presented. (c) 2008 Elsevier Ltd. All rights reserved.