Journal
OPTICAL MATERIALS
Volume 31, Issue 7, Pages 1054-1058Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.optmat.2007.12.019
Keywords
Lithium niobate; Crystal ion slicing; Wafer bonding; Thin films; Integrated optics; Photonic devices
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We report on sub-micrometer thick LiNbO(3) films Produced by an improved crystal ion slicing and bonding technique using polymer adhesive benzocyclobutene. The latter enables to reproducibly fabricate defect-free films with an area of several cm(2). The method supports also integration of tuning electrodes enabling realization of complex electro-optically active photonic devices on a single chip. Furthermore, the structuring techniques to produce high-index-contrast (Delta n approximate to 0.65) single-mode optical waveguides are described. The big potential of the novel LiNbO(3) thin films for high-density integrated optics applications is shown on an example of electro-optically tunable microring resonator. (C) 2008 Elsevier B.V. All rights reserved.
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