Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 307, Issue -, Pages 119-122Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2012.12.067
Keywords
Multi-target magnetron co-sputtering; Zr-Nb-N nanocomposite coating; Solid-solution microstructure; Grain size; Hardness; Residual stress
Ask authors/readers for more resources
Growth, structure, and mechanical properties of the nanocomposite Zr-Nb-N coatings deposited on Si(100) at different substrate bias voltages and substrate temperatures were performed by multi-target magnetron co-sputtering system. Extensive measurements were taken to investigate the influences of substrate bias voltage and deposition temperature on microstructure, hardness, elastic modulus, residual stress, critical fracture load. The maximum hardness and elastic modulus was up to 36 GPa and 425 GPa, respectively. The hardest coating also showed the lowest residual stress and the highest critical load. These enhancement effects should be related to nanocrystalline solid-solution microstructure formation and smaller grain size. These Zr-Nb-N coatings appeared to be a promising composite coating system suitable for engineering applications. (C) 2013 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available