Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 266, Issue 11, Pages 2638-2642Publisher
ELSEVIER
DOI: 10.1016/j.nimb.2007.12.064
Keywords
3D confocal setup; Micro-XRF; spatial resolution; depth scan
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A tabletop confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) setup was designed, based on polycapillary X-ray optics and a micro-focus X-ray source. This confocal setup consists of a polycapillary full lens to focus the incident beam and a polyapt capillary half lens to collect the X-ray fluorescence. The confocal volume was proved to be ellipsoidal. The full-width at half maximum (FWHM) of the confocal volume in three directions were measured with a knife edge scan method to obtain the spatial resolution of the confocal setup. The structure of multilayer samples was studied using the depth scan technique. (C) 2007 Elsevier B.V. All rights reserved.
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