Characterization and applications of a new tabletop confocal micro X-ray fluorescence setup

A tabletop confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) setup was designed, based on polycapillary X-ray optics and a micro-focus X-ray source. This confocal setup consists of a polycapillary full lens to focus the incident beam and a polyapt capillary half lens to collect the X-ray fluorescence. The confocal volume was proved to be ellipsoidal. The full-width at half maximum (FWHM) of the confocal volume in three directions were measured with a knife edge scan method to obtain the spatial resolution of the confocal setup. The structure of multilayer samples was studied using the depth scan technique. (C) 2007 Elsevier B.V. All rights reserved.