Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 266, Issue 12-13, Pages 3095-3099Publisher
ELSEVIER
DOI: 10.1016/j.nimb.2008.03.169
Keywords
track-etch technique; conical nanopore; shape control; cone angle; organic solvent
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In this paper, a systematic investigation of the influence of ethanol on the shape of conical pores in track-etched poly(ethylene terephthalate) films was described. Cone angle of the conical nanopore was dependent on the volume proportion of ethanol present in the etchant. By varying the percentage of ethanol in the etching solution, the cone angle of the conical nanopore could be enlarged from 0.65 degrees up to 4 degrees and be precisely controlled. Results of this technique were confirmed by both the scanning electron microscope observation of the pore profile and analysis of the track etch ratio model with respect to the amount of ethanol content. (c) 2008 Elsevier B.V. All rights reserved.
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