Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models. Crown Copyright (C) 2010 Published by Elsevier B.V. All rights reserved.