Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 616, Issue 2-3, Pages 93-97Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nima.2009.10.094
Keywords
Hard X-ray nanoprobe; Hard X-ray scanning microscope; Refractive X-ray lenses; Nanofocusing lenses
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We describe the hard X-ray scanning microscope planned for the new synchrotron radiation source PETRA III at DESY in Hamburg, Germany. It is based on nanofocusing refractive X-ray lenses and is designed for two-dimensional mapping and scanning tomography. It supports X-ray fluorescence and (coherent) diffraction contrast, yielding elemental and structural information from inside the sample. Spatial resolutions down to well below 50 nm are aimed for in direct space. A further increase in spatial resolution is expected by applying ptychographic scanning schemes. The optical scheme with a two-stage focusing optic is described. (C) 2009 Elsevier B.V. All rights reserved.
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