Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 616, Issue 2-3, Pages 140-146Publisher
ELSEVIER
DOI: 10.1016/j.nima.2009.11.021
Keywords
Autocollimator; Angle; Angle calibration; Topography measurement; Precision metrology; Traceability
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The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined. (C) 2009 Elsevier B.V. All rights reserved.
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