Journal
SURFACE AND INTERFACE ANALYSIS
Volume 47, Issue 11, Pages 1020-1028Publisher
WILEY-BLACKWELL
DOI: 10.1002/sia.5809
Keywords
ion implantation; WO3 film; gas sensitivity; optical property
Categories
Funding
- Council of Scientific and Industrial Research, New Delhi, India
Ask authors/readers for more resources
In this paper we report the optical and gas sensing behaviours of tungsten oxide (WO3) films, implanted with 45-keV N5+ ions of different fluences in the range 1x10(15) to 1x10(17)cm(-2). The film with fluence 1x10(15)cm(-2) shows the most intense PL spectrum with two prominent peaks near UV and blue regions. The morphological changes because of ion implantation are also investigated by atomic force microscopy. Because of implantation the gas sensitivity of the film, in exposure of methane, is found to increase with reasonably fast response and recovery times. With the increase of the concentration of methane, the sensors show better result. Present work also includes the effect of N5+ ion implantation on the structural property of WO3 films. Copyright (c) 2015 John Wiley & Sons, Ltd.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available