Journal
NEW JOURNAL OF PHYSICS
Volume 11, Issue -, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1367-2630/11/3/033020
Keywords
-
Categories
Funding
- Deutsche Forschungsgemeinschaft [SFB/TR 24]
- International Max Planck Research Schoo
- German State of Mecklenburg-Vorpommern
Ask authors/readers for more resources
The tunable diode laser absorption spectroscopy method was used to measure Ar metastable density in order to study the dust growth process in hydrocarbon-containing plasmas. A simple model was proposed that successfully interprets the experimental results of pristine plasmas. The model is also suitable for explaining the influence of dust particle size on metastable density and for examining the dust growth process. The metastable density responded strictly to the formation of dust particles and their growth in processing plasmas. Using metastable density as an indicator is, therefore, a non-intrusive and effective method for the study of the dust growth process in hydrocarbon-containing plasmas.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available